SEMICAPS – Excellence in Innovation

Explore our comprehensive range of world-leading fault localization microscopes, cutting-edge analysis techniques, and precision accessories designed for semiconductor design-debug, yield improvement, and failure analysis.

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🔧 Configurations

Products World-Leading Fault Localization Systems

SEMICAPS 1100

Products

SEMICAPS 1100

Upright Analytical Microscope System

A standalone lab based upright analytical microscope system for comprehensive semiconductor analysis with ultra-stable performance.

Key Features

Backside and frontside analysis capability
Ultra-stable system compatible for probing FIB pads
High resolution stage with 0.5 μm repeatability
ARSIL option for 3nm node probing
CAD interface compatibility

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SEMICAPS 3000

Products

SEMICAPS 3000

Inverted Tester Dockable System

An inverted microscope system that is tester dockable, easily moved from tester to tester with custom docking for all ATE platforms.

Key Features

Backside analysis with ATE platform docking
Easily moved between different testers
Custom docking for all ATE platforms
High resolution stage with 0.5 μm repeatability
Thermal management solutions compatible

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SEMICAPS 4000

Products

SEMICAPS 4000

Analytical & Tester Dockable System

A versatile upright microscope system that functions both as a standalone analytical tool and a tester dockable solution.

Key Features

Dual-mode operation: standalone and tester dockable
Frontside and backside analysis capability
Custom tester docking solutions
High resolution stage with 0.5 μm repeatability
CAD interface compatibility

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SEMICAPS 5000

Products

SEMICAPS 5000

Direct Tester-Docked Wafer Prober

An inverted direct tester-docked system designed for wafer probing applications with 300mm wafer handling capability.

Key Features

Direct docking to ATE testers
300mm wafer handling capability
Inverted microscope design for backside analysis
High throughput wafer probing
Compatible with all major ATE platforms

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🔬 Techniques

Solutions Advanced Analysis Techniques

Laser Timing Probe (LTP)

Solutions

Laser Timing Probe (LTP)

Non-Contact Waveform Measurement

Revolutionary instrument that measures waveforms at any selected point inside a semiconductor device without physical contact, using precision laser technology.

Key Features

Non-invasive backside waveform detection
FFT Frequency Mapping for signal path tracing
Bandwidth up to 12 GHz
Test loop lengths up to 1000 ms
Rise time measurement < 40 ps

Resolution Centric & Aplanatic RSILs

Bandwidth Up to 12 GHz

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Photon Emission Microscopy (PEM)

Solutions

Photon Emission Microscopy (PEM)

Sensitive Light Detection

Advanced emission microscopy technology for detecting weak light emissions from semiconductor devices, enabling precise fault localization.

Key Features

Ultra-sensitive photon detection
Time-resolved emission analysis
Backside and frontside imaging
Integration with CAD navigation
Compatible with all SEMICAPS platforms

Detection InGaAs Camera

Mode Static & Dynamic

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Scanning Optical Microscopy (SOM)

Solutions

Scanning Optical Microscopy (SOM)

High-Resolution Imaging

Advanced optical microscopy solution providing high-resolution imaging capabilities for semiconductor analysis and inspection.

Key Features

High-resolution optical imaging
Multiple imaging modes
CAD overlay capability
Automated scan routines
Integration with analysis software

Resolution Sub-micron

Imaging Reflected & Transmitted

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Thermal Microscopy (THM)

Solutions

Thermal Microscopy (THM)

Thermal Analysis Solution

Comprehensive thermal imaging and analysis solution for identifying hotspots and thermal anomalies in semiconductor devices.

Key Features

High-sensitivity thermal imaging
Real-time temperature mapping
Backside thermal analysis
Integration with electrical testing
Automated hotspot detection

Sensitivity mK Resolution

Mode Lock-in & Steady State

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⚙️ Accessories

Accessories Precision Enhancement Solutions

Auricool

Accessories

Auricool

Advanced Cooling System

A patented cooling system for dynamic laser technique and laser waveform probing, capable of handling >200W heat flux with proprietary thermal interface.

Key Features

Patented design for active DUT heat removal
Handles up to >200W of heat flux
Proprietary thermal interface with closed loop chiller
Compatible with SIL and air gap lenses
Accommodates die-side components with flexible pins

Heat Capacity >200W Heat Flux

Patent US 9,917,034

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ARSIL

Accessories

ARSIL

Aplanatic Solid Immersion Lens

High-performance solid immersion lens technology enabling sub-wavelength resolution for advanced node semiconductor analysis.

Key Features

Aplanatic design for optimal resolution
Silicon substrate compatibility
Enhanced NA for advanced nodes
Compatible with all SEMICAPS systems
Easy lens changing mechanism

Type Aplanatic SIL

Application 3nm Node Compatible

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Liquid Crystal

Accessories

Liquid Crystal

Cost-Effective Hotspot Location

A cost-effective solution for hotspot detection and thermal fault localization using liquid crystal technology.

Key Features

Cost-effective thermal analysis
Quick hotspot identification
Non-contact measurement
Easy setup and operation
Compatible with various substrates

Method Liquid Crystal

Application Hotspot Detection