Products – Configurations

SEMICAPS 1100

A standalone lab based upright analytical microscope system

  • Ultra-stable system compatible for probing FIB pads
  • Compatible with third-party probe stations, probe cards and manipulators
  • High resolution stage with 0.5 μm repeatability
  • Option to use with Aplanatic Refractive Solid Immersion Lens (ARSIL)
  • CAD interface option
  • Compatible with thermal management solutions
  • Microscope Techniques includes a combination of:
    • Laser Timing Probe (LTP)
    • Scanning Optical Microscopy (SOM) with best sensitivity
      • static: TIVA, OBIRCH
      • dynamic: LADA, SDL
  • Photon Emission Microscopy (PEM) with various options for
      • InGaAs or Si-CCD camera
      • Thermal Microscopy (THM) with InSb camera
  • Dual Column: NIR/Thermal
For backside and frontside analysis of wafers, wafer parts and packaged devices

SEMICAPS 3000

An inverted microscope system that is a tester dockable

  • Easily moved from Tester to Tester
  • Custom docking for all ATE platforms
  • High resolution stage with 0.5 μm repeatability
  • Option to use with an Aplanatic Refractive Solid Immersion Lens (ARSIL)
  • CAD Interface option
  • Compatible with Thermal Management Solutions
  • Microscope Techniques include a combination of:
    •  Laser Timing Probe (LTP)
    • Scanning Optical Microscopy (SOM) with best sensitivity
      • static: TIVA, OBIRCH
      • dynamic: LADA, SDL
    • Photon Emission Microscopy (PEM) with various option for
      • InGaAs or Si-CCD Camera
      • Thermal Microscopy (THM) with InSb camera
For backside and frontside analysis of wafers, wafer parts and packaged devices. Able to dock with all ATE platforms

SEMICAPS 4000

An inverted system that is both analytical and tester dockable

  • 300 mm wafer stage including auto-lock
  • Compatible with third-party probe stations, probe cards and manipulators
  • Docks easily to Tester or Probe Station
  • High resolution stage with 0.5 um repeatability
  • Option to use with an Aplanatic Refractive Solid Immersion Lens (ARSIL)
  • CAD interface option
  • Compatible with Thermal Management Solutions
  • Microscope Techniques include a combination of:
  • Laser Timing Probe (LTP)
  • Scanning Optical Microscopy (SOM) with best sensitivity
      • static: TIVA, OBIRCH
      • dynamic: LADA, SDL
  • Photon Emission Microscopy (PEM) with various options for
      • InGaAs or Si-CCD camera
      • Thermal Microscopy (THM) with InSb camera
Analytical or ATE docked configuration

SEMICAPS 5000

A full analytical direct tester-docked wafer prober system

  • Elminate the need for sorting, dicing and repackaging of the wafer
  • Able to analyze at full tester speeds of up to 8 GHz
  • Land more than 10000 pins using a standard production probe card
  • High resolution motorized XYZ wafer stage with 0.1µm accuracy
  • Able to handle 200mm and 300mm wafers
  • ARSIL option: compatible with full thickness, unthinned wafer
Wafer analysis using a combination of Laser Timing Probe (LTP), Scanning Optical Microscope (SOM), Photon Emission Microscope (PEM) and Thermal Microscopy (THM)