Laser Scan Module Resolution, 64, 128, 256, 512,1024, 2048 Frame Mode, 512 x 512 pixel: 1.6, 3, 6, 12 s/frame Frame Mode, 1024 x 1024: 6.4, 12, 24, 48 s/frame Point Mode: access time is per 75 us per pixel Scan Area, 5X: 3.6mm x 3.6mm; 100x: 0.09mm x 0.09mm Power Delivery: >30mW at DUT for 100X 0.85 NA objective for both lasers