1. Photon Emission Microscopy Option - Integration of PEM
camera module onto the SOM system
- Si-Cooled CCD Camera Module
- InGaAs Camera Module (TE-Cooled, LN2 Cooled)
- MCT Camera Module
2. Probe Station Integration Option
- SEMICAPS Probe Station (300mm)
- Suss Probe Station
- Cascade Probe Station
- Signatone Probe Station
Description