Multi-laser
Capability The standard
SEMICAPS SOM system uses two near-IR lasers. The 1064nm laser is
capable of efficient electron-hole pair generation through backside
silicon while the 1340nm laser is a high resolution thermal probe
which allows localized heating. The laser multiplexer provides
seamless selection, attenuation and pulsing of the lasers.
Additional laser can be integrated into the system.
High laser power delivery
The laser power on the device is greater than 30mW for all
conventional long working distance objective
High resolution laser scan image resolution is up to
2048x2048. The spatial resolution is less than 0.75um for 1064nm
laser using a conventional long working distance objective. Higher
spatial resolution can be achieved using the Solid Immersion Lens (SIL)
option or Diffractive Lens option
Multi-technique capability
The system is compatible with the following thermal stimulation
techniques: OBIRCH, TIVA, SEI, TBIP, DReM, SDL-RIL, and the
following carrier generation techniques: OBIC, SCOBIC, LIVA and LADA.
The system is also upgradable for future laser induced techniques
TV-Rate camera for navigation
The system incorporates a TV-rate navigation camera for real-time
backside imaging to complement the laser scan module
Multi-detector capability
The microscope module is custom designed to provide maximum
flexibility for the optical components required for various
detectors and sources. Optional detectors like Si-CCD, InGaAs, IREM,
MCT and Laser Marker can be mounted on the system.
High resolution stage
The system comes with linear servo and linear encoder stages with
20nm resolution and repeatability better than 0.5um. The linear
servo mechanism allows users to move the stages with minimal
vibration
Proprietary laser induced signal digitization hardware
The system comes with a proprietary digitization hardware capable of
providing the average, sum and string of values. The summing and
averaging modules are capable of 1 million samples and more than
8000 string values
Flexible system configurations
SEMICAPS SOM is offered in various configurations: analytical,
inverted analytical, upright and inverted tester docked models
Description