SEMICAPS SOM 4000
Inverted Analytical And Tested-Docked Scanning Optical
Microscope System

Analytical to tested-docked mode conversion
300mm wafer stage with auto-lock feature
Backside and frontside analysis modes

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SEMICAPS SOM 3000
Inverted Tested-Docked Scanning Optical Microscope System

Adaptable to various ATE
High NIR lasers compatible
Refractive and diffractive Solid Immersion Lens (SIL) option
Thermal Management option

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SEMICAPS SOM 2000
Upright Tester-Docked Scanning Optical Microscope System
Adaptable to various ATE
Ease of system portability
Thermal Management option
CAD interface option
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SEMICAPS SOM 1100
Upright Analytical Scanning Optical Microscope System

High resolution laser scanner with up to 2Kx2K scan resolution
High power NIR lasers compatible
Laser marker option
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