SEMICAPS SOM is a scanning optical microscope used for fault
localization of integrated circuits using laser induced phenomena.
It is an integrated compucentric system designed for maximum ease of
use and flexibility. The system is optimized for high laser power
delivery, sensitivity and spatial resolution. The open architecture
of the system allows the application of current and future laser
induced techniques. The modular design facilitates customization
according to user requirements SEMICAPS offers 2 types of SOM
configurations for industrial use, the Analytical (Upright/Inverted)
and the Tester Docked (Inverted) systems. The systems are designed
for OBIC, SCOBIC, LIVA, TIVA, SEI, OBIRCH and pulsed laser technique
and are upgradable for future techniques. The system uses a 1064nm
and a 1340nm laser. The 1064nm laser is capable of electron-hole
pair generation through backside silicon while the 1340nm laser is a
high resolution thermal probe which allows localized heating. The
laser multiplexer provides seamless selection, attenuation and
blanking of the two lasers. SEMICAPS microscope module is custom
designed to provide maximum flexibility for the optical components
required for various techniques. Included in the microscope module
is a motorized detector selector, two 3-position optical component
turrets and a 5-position objective turret. The system comes with an
auxiliary signal port, which has a proprietary hardware averager
capable of 1 million sample averaging.
Description